Plasma-enhanced CVD.


Plasma-enhanced CVD. Relation of PECVD to other processesTypical processes and hardware Specific applications Examples of PECVD modeling software . PECVD and other CVD processes.. . What is Plasma-enhanced CVD. Plasma Enhanced CVD (PECVD) is a process where glow-discharge plasma is sustained in a reaction chamber. This technology was developed to meet a demand from the semiconductor industry to have a low temperature process of silicon nitride films for the passivation and insulation of the 9455

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Plasma-enhanced CVD.

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